Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements
- 1 January 1991
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 19-20, 511-516
- https://doi.org/10.4028/www.scientific.net/ssp.19-20.511
Abstract
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