Microstrip resonator using sputtered Y1Ba2Cu3O7- deltafilm on (100) MgO
- 1 November 1991
- journal article
- Published by IOP Publishing in Superconductor Science and Technology
- Vol. 4 (11) , 577-578
- https://doi.org/10.1088/0953-2048/4/11/005
Abstract
The design, development and measurement of an X-band microstrip resonator fabricated using a sputtered Y1Ba2Cu3O7- delta thin film are presented. The films were grown in situ at 700 degrees C in a hollow cylindrical magnetron sputtering system. The resonator is a capacitive-gap coupled two-port transmission-type resonator in a microstrip configuration. The measurements were carried out in the temperature range 30 K to 300 K using a closed cycle He cryocooler. The resonator patterns on the sputtered Y1Ba2Cu3O7- delta film were generated using conventional photolithography and wet-etch process. Microwave surface resistance values obtained for the above resonator are compared with those of conventional gold resonators.Keywords
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