Abstract
Inductively stabilized discharges are developed for the rare-gas halide minilasers. 6.8 mJ per pulse with 40-ns full width at half-maximum pulse lengths and 3.7 mJ per pulse with 60-ns full width at half-maximum pulse lengths are obtained for KrF. 3.1 mJ per pulse with 40-ns full width at half-maximum pulse lengths and 1.7 mJ per pulse with 60-ns full width at half-maximum pulse lengths are obtained in XeCl. The discharge dimensions are 2.5-mm electrode separation by 4 mm wide and 27.6 cm long. Orders of magnitude increases in pulse repetition frequency are obtained in devices that do not utilize gas flow.