Optical Beam Induced Currents: Investigations of Integrated Circuits Using Different Excitation Wavelengths

Publisher Website
Google Scholar
Abstract
A laser scanning microscope with different laser wavelengths is used to investigate internal binary states and diffusion parameters of integrated circuits. With blue laser radiation the internal logical levels in the integrated circuits could be detected. Red and i.r. radiation are used to investigate the depth and location of doped wells. Applying three wavelengths could distinguish between surface and bulk recombination.