Low-voltage electron-beam lithography with scanning tunneling microscopy in air: A new method for producing structures with high aspect ratios
- 1 March 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (2) , 1327-1330
- https://doi.org/10.1116/1.589090
Abstract
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