Mass spectrometric investigation of gas switching in an InGaAsP MOVPE system
- 1 September 1986
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 77 (1-3) , 79-84
- https://doi.org/10.1016/0022-0248(86)90285-x
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Mass Spectrometric Study of Ga ( CH 3 ) 3 and Ga ( C 2 H 5 ) 3 Decomposition Reaction in H 2 and N 2Journal of the Electrochemical Society, 1985
- On the effect of carrier gas on growth conditions in MOCVD reactors; Raman study of local temperatureJournal of Crystal Growth, 1984
- Metalorganic InP and Inx Ga1-x, Asy P1-y, on InP epitaxy at atmospheric pressureJournal of Electronic Materials, 1984
- Quantum-well heterostructure lasersIEEE Journal of Quantum Electronics, 1980