Infrared spectroscopic study of Cr and Cu metallization of polyimide
- 1 March 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (2) , 253-255
- https://doi.org/10.1116/1.576128
Abstract
Infrared spectra of polyimide films [pyromellitic dianhydride–oxydianiline (PMDA–ODA)]metallized with 1 nm of Cr or Cu are used to describe the nature of metal–polyimide bonds formed at the interface. Cr and Cu cause similar changes in the polyimide spectrum though larger changes were observed for the more reactive Cr. The spectral evidence indicates that the metals react predominantly with the PMDA part of the polyimide with only minor interactions with the ODA segment. The results confirm previous observations which suggest that the carbonyl groups on the polymer surface are the primary reaction sites; no complex formation between the metal atoms and the aromatic rings in the polymer chain was observed. These conclusions are supported by infrared studies of Cr or Cu metallized poly(ethylene terephthalate) thin films.Keywords
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