Metastable Defects in Oxide Thin Films

• 1 June 1999
• journal article
• Published by Trans Tech Publications, Ltd. in Key Engineering Materials
• Vol. 169-170, 155-158
• https://doi.org/10.4028/www.scientific.net/kem.169-170.155

Abstract

Keywords

• METASTABLE DEFECTS
• SIMS
• SPUTTERING
• ZINC OXIDE (ZNO)