The Si-Planar-Pellistor array, a detection unit for combustible gases
- 31 October 1993
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 16 (1-3) , 260-264
- https://doi.org/10.1016/0925-4005(93)85192-d
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The Si planar pellistor: a low-power pellistor sensor in Si thin-film technologySensors and Actuators B: Chemical, 1991
- A new microsensor for environmental measurementsSensors and Actuators B: Chemical, 1991
- Gas analysis by partial model buildingSensors and Actuators B: Chemical, 1990