Microactuators for microrobots: a critical survey
- 1 September 1992
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 2 (3) , 141-157
- https://doi.org/10.1088/0960-1317/2/3/005
Abstract
The authors present a critical survey of some representative technologies which are candidates for the development of microactuators for microrobots. Since the field of 'microrobotics' is an entirely new one, some concepts and definitions are given first; in particular, a distinction between 'micromachines' and 'microrobots' is proposed. Then, a further classification is proposed between three different types of robots: the 'miniature' robot, the 'microrobot' and the 'nanorobot', and their expected performances and fields of applications are discussed. The need for developing dedicated miniature actuators and microactuators emerges clearly from this discussion, together with the main requirements for this class of 'new' actuators. Finally, some significant examples of implementation of microactuators are illustrated, and the main advantages and limitations of each technology are discussed.Keywords
This publication has 33 references indexed in Scilit:
- There's plenty of room at the bottom [data storage]Journal of Microelectromechanical Systems, 1992
- Silicon-processed overhanging microgripperJournal of Microelectromechanical Systems, 1992
- Special Issue on Micro-MachineJournal of Robotics and Mechatronics, 1991
- Micro MechanismsJournal of Robotics and Mechatronics, 1991
- Recent Trends in the Development of New ActuatorsJournal of Robotics and Mechatronics, 1991
- STM as a MicromachineJournal of Robotics and Mechatronics, 1991
- Intelligence for miniature robotsSensors and Actuators, 1989
- Design considerations for micromachined electric actuatorsSensors and Actuators, 1988
- Sensor materials for the future: Intelligent materialsSensors and Actuators, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987