Optimization of series resistance in sub-0.2 μm SOI MOSFETs

Publisher Website

30 December 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

https://doi.org/10.1109/iedm.1993.347211

Abstract

No abstract available

Keywords

This publication has 5 references indexed in Scilit:

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Sub-quarter-micrometer CMOS on ultrathin (400 AA) SOI
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Formation of epitaxial CoSi2 films on (001) silicon using Ti-Co alloy and bimetal source materials
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The impact of intrinsic series resistance on MOSFET scaling
IEEE Transactions on Electron Devices, 1987