Integrated uncooled infrared detector imaging arrays
- 2 January 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
The authors describe a new type of infrared (IR) focal plane consisting of a 2-D array of microminiature bolometers (microbolometers) fabricated, complete with readout electronics, as a monolithic silicon chip. These focal planes require no cooling for sensitive detection of IR radiation. The authors report high-quality IR imaging obtained with such focal planes.Keywords
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