Applications for surface-micromachined polysilicon thermal actuators and arrays
- 1 January 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 58 (1) , 19-25
- https://doi.org/10.1016/s0924-4247(97)80220-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Micromachined 1 × 2 optical-fiber switchSensors and Actuators A: Physical, 1996
- Micromachined corner cube reflectors as a communication linkSensors and Actuators A: Physical, 1995