Photolithographic Contact Printing of 4000Å Linewidth Patterns

• 1 January 1974
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 121  (11) , 1503
• https://doi.org/10.1149/1.2401719

Abstract

Keywords

• LINEWIDTH PATTERNS
• CONTACT PRINTING
• PHOTOLITHOGRAPHIC CONTACT
• PRINTING OF 4000A