Long-Term Stability of Nickel in Resonant Micro-Mechanical Devices

This publication has 3 references indexed in Scilit:

• A micromachined comb-drive tuning fork rate gyroscope
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Laterally Driven Polysilicon Resonant Microstructures
  Sensors and Actuators, 1989
• Engineering Properties of Nickel and Nickel Alloys
  Published by Springer Nature ,1971