Stress-induced pattern-placement errors in thin membrane masks

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3528-3532
• https://doi.org/10.1116/1.587464

Abstract

Keywords

• MEMBRANE MASKS
• PLACEMENT ERRORS
• THIN MEMBRANE
• STRESS INDUCED
• INDUCED PATTERN PLACEMENT