Thin film structure to reduce radiation damage in x-ray lithography

• 1 January 1987
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 5  (1) , 248-252
• https://doi.org/10.1116/1.583876

Abstract

Keywords

• THIN FILM
• IONIZING RADIATION
• RADIATION DAMAGE
• ELECTROMAGNETIC RADIATION