XPS Analysis of Titanium Nitride and Zirconium Nitride Compound Thin Layer Formed by Nitrogen Ion Implantation.

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1 January 1992

journal article
Published by The Surface Finishing Society of Japan in Journal of The Surface Finishing Society of Japan

Vol. 43 (1) , 19-23
https://doi.org/10.4139/sfj.43.19

Abstract

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