Poly(arylsulfone imide) as E-beam resist: Synthesis and radiolysis

• 1 February 1989
• journal article
• research article
• Published by Wiley in Journal of Polymer Science Part A: Polymer Chemistry
• Vol. 27  (3) , 915-928
• https://doi.org/10.1002/pola.1989.080270316

Abstract

Keywords

• IMIDIZATION
• RADIOLYSIS
• BIS
• LOSS
• PHTHALIC
• GAVE
• AROMATIC
• SOLUBLE
• CROSSLINKING
• MOIETIES