Double-Beam Interferometers For Analysis Of Thin Films
- 1 December 1980
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 19 (6) , 196801
- https://doi.org/10.1117/12.7972614
Abstract
Three recently developed methods are described and their capabilities discussed. Each of these methods is applicable for the accurate determination of the thickness, refractive index and absorption of thin films.Keywords
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