Separation of thin aluminium films from silicon substrates
- 1 May 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 139 (2) , L77-L78
- https://doi.org/10.1016/0040-6090(86)90341-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Fluorine bomb calorimetry. XXII. Enthalpy of formation of aluminum trifluorideInorganic Chemistry, 1967
- FLUORINE BOMB CALORIMETRY. V. THE HEATS OF FORMATION OF SILICON TETRAFLUORIDE AND SILICA1,2The Journal of Physical Chemistry, 1963
- THE HEAT OF FORMATION OF SILICA AND SILICON TETRAFLUORIDE1,2The Journal of Physical Chemistry, 1962