Application of polymers containing pendant nitroaryl groups to photoresists.

• 1 January 1986
• journal article
• Published by The Chemical Society of Japan in NIPPON KAGAKU KAISHI
• No. 1,p. 65-72
• https://doi.org/10.1246/nikkashi.1986.65

Abstract

Keywords

• POLYMERS CONTAINING PENDANT
• PENDANT NITROARYL GROUPS
• CONTAINING PENDANT NITROARYL
• GROUPS TO PHOTORESISTS