Coating thickness measurement by electron probe microanalysis

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Abstract
Two methods of measuring coating thickness in an electron probe microanalyser without the aid of standards are described, and thickness calibration curves in terms of the x-ray intensity from coating or substrate material are illustrated. Agreement between the micro-analysis methods and others is within 15%. For 29 kv electrons, the range of measurable thickness is 2 × 10-4 to 1.5 mg cm-2. It is shown that the coating intensity method is more accurate for coatings up to about a quarter of the electron range while the substrate method is the better for the thicker coatings.