Rf Magnetron Sputter Deposition and Characterization of Aluminum Nitride thin Films
- 1 January 1986
- journal article
- Published by Springer Nature in MRS Proceedings
- Vol. 77, 399
- https://doi.org/10.1557/proc-77-399
Abstract
No abstract availableKeywords
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- Growth morphology and surface-acoustic-wave measurements of AIN films on sapphireJournal of Applied Physics, 1975
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