Crosstalk reduction with a micromachined diaphragm structure for integrated ultrasound transducer arrays
- 1 January 1992
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 39 (1) , 48-53
- https://doi.org/10.1109/58.166810
Abstract
Crosstalk reduction in a polyvinylidene fluoride (PVDF) integrated ultrasound transducer array with a micromachined diaphragm structure is reported. Three sets of linear arrays with nine 1 mm*1 mm elements on dielectric diaphragms have been made. They were fabricated with (1) a solid substrate, (2) a single large diaphragm window underneath the entire array, and (3) a small diaphragm window (SW) for each array element. To estimate crosstalk and fringe field effects in each array, the authors measured each array's angular response in the far field of an unfocused source transducer. A Fourier transform analysis was then performed on the measured data to obtain each array's directivity pattern, which in turn was fitted to theoretical curves based on a crosstalk model. Crosstalk-related parameters have been extracted from curve-fitting and their values show that the array with the SW structure for each element has the least electrical and acoustical crosstalk and fringe field effects.<>Keywords
This publication has 4 references indexed in Scilit:
- Micromachining for improvement of integrated ultrasonic transducer sensitivityIEEE Transactions on Electron Devices, 1990
- An experimental investigation of the cross-coupling between elements of an acoustic imaging array transducerUltrasonic Imaging, 1982
- Non-Ideal Radiators in Phased Array TransducersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1981
- Integrated silicon-PVF2acoustic transducer arraysIEEE Transactions on Electron Devices, 1979