Surface cleaning efficiency measurements for UHV applications

• 30 April 1999
• journal article
• Published by Elsevier in Vacuum
• Vol. 53  (1-2) , 317-320
• https://doi.org/10.1016/s0042-207x(98)00364-9

Abstract

Keywords

• CHEMISTRY
• FLUORINE
• PARTICLE ACCELERATION
• CHARGED PARTICLES