Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications
- 1 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 482-487
- https://doi.org/10.1016/s0924-4247(97)80008-8
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993
- A heated membrane for a capacitive gas sensorSensors and Actuators A: Physical, 1992