Segregation Coefficient of Boron and Arsenic at Polycrystalline Silicon / SiO2 Interface
- 1 October 1993
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 140 (10) , 2960-2964
- https://doi.org/10.1149/1.2220939
Abstract
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