Buried and graded/buried LDD structures for improved hot-electron reliability
- 1 June 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 7 (6) , 380-382
- https://doi.org/10.1109/EDL.1986.26407
Abstract
New buried and graded/buried lightly doped drain (LDD) structures have been demonstrated, for the first time, to improve significantly the hot-electron reliability of NMOS devices. Both LDD structures have peak doping of the n- spacer implant approximately 1000 A below the Si-SiO2interface forming a "buried" n- spacer near the drain region. In the graded/buried LDD structure the junction of the "buried" n- spacer is further graded by an additional low-dose phosphorus spacer implant.Keywords
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