Crystalline anodic silicon dioxide on silicon
- 16 December 1978
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 50 (2) , 627-633
- https://doi.org/10.1002/pssa.2210500232
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Induced crystallization of amorphous silicon oxidePhysica Status Solidi (a), 1977
- Local Crystallization of Thermal Oxide Film of SiliconJapanese Journal of Applied Physics, 1971
- Tracer Investigation of Hydroxyls in SiO[sub 2] Films on SiliconJournal of the Electrochemical Society, 1971
- Low-temperature oxidationOxidation of Metals, 1970
- Ordered Structure and Ion Migration in Silicon Dioxide FilmsJapanese Journal of Applied Physics, 1968
- Anodic growth mechanism of oxides with low ionic conductivitySolid State Communications, 1968
- Influence of Electric Field on the Growth of Thin Metal FilmsJournal of Applied Physics, 1966
- An Ellipsometric Study of Steady-State High Field Ionic Conduction in Anodic Oxide Films on Tantalum, Niobium, and SiliconJournal of the Electrochemical Society, 1966
- GROWTH OF THIN METAL FILMS UNDER APPLIED ELECTRIC FIELDApplied Physics Letters, 1965