Improved MgF2etalon plates for Fabry-Perot interferometry in the VUV from 170 to 138 nm
- 1 November 1980
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 13 (11) , 1159-1162
- https://doi.org/10.1088/0022-3735/13/11/006
Abstract
To extend multiple beam interferometry in the VUV range below the limit of fused silica at 167 nm, magnesium fluoride etalon plates have been developed. The coatings are double layer films of Al-MgF2 as in silica interferometers. These etalon plates give improved performances for the transmission and the recorded finesse. Interferograms are presented for some UV transitions between 160 nm and 138 nm.Keywords
This publication has 4 references indexed in Scilit:
- Compact far ultraviolet emission source with rich spectral emission 1150–3100 ÅApplied Optics, 1977
- MgF_2 Fabry-Perot etalon plates for the vacuum ultravioletApplied Optics, 1976
- Recent developments in multiple beam interferometry in the ultraviolet region 1700–2500 ÅOptics Communications, 1974
- On the Scanning Fabry-Perot InterferometerPhysica Scripta, 1973