New method of domain inversion in LiNbO 3 using thermal oxidation of Ti film

Abstract
A new technique for fabricating domain inversion regions in –c face LiNbO3 by thermal oxidation of Ti is reported. This technique can minimise refractive index changes in such regions, thus it is suitable for quasiphase-matching (QPM) second harmonic generation (SHG). A prototype QPM waveguide SHG device is also demonstrated.

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