Self Bias of an R.F. Driven Probe in an R.F. Plasma
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- An electrostatic probe technique for RF plasmaJournal of Physics E: Scientific Instruments, 1987
- The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmasJournal of Physics D: Applied Physics, 1987
- High-impedance capacitive divider probe for potential measurements in plasmasReview of Scientific Instruments, 1982
- Investigation of an rf Plasma with Symmetrical and Asymmetrical Electrostatic ProbesJournal of Applied Physics, 1972
- Effect of a R.F, signal on the characteristic of a langmuir probeIl Nuovo Cimento (1869-1876), 1963
- Notes on the Effect of Noise on Langmuir Probe CharacteristicsProceedings of the Physical Society, 1962