Application of gold plated edges for the measurement of the electron beam diameter
- 1 March 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 13 (1) , 185-188
- https://doi.org/10.1016/0167-9317(91)90073-m
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Tungsten calibration markers for electron beam pattern generatorsMicroelectronic Engineering, 1989
- Measurement of the profile of finely focused electron beams in a scanning electron microscopeJournal of Physics E: Scientific Instruments, 1984