Scaling limits in batch-fabricated silicon pressure sensors
- 1 April 1987
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 34 (4) , 850-858
- https://doi.org/10.1109/t-ed.1987.23006
Abstract
The scaling properties of silicon capacitive and piezoresistive pressure sensors are described. An evaluation of the various noise mechanisms and pressure offsets in the scaled devices is presented, including Brownian noise, electrical noise, electrostatic pressure variations and pressure offset due to resistor mismatch. The analysis of diaphragm deflection includes the effects of intrinsic stress and the transition from plate theory to membrane theory. Both ultraminiature and ultrasensitive sensors are considered. Ultraminiature piezoresistive sensors with diaphragms measuring 100 µm in length and resolving 1 mmHg should be possible using present technology as well as ultrasensitive capacitive sensors that resolve 1 µmHg.Keywords
This publication has 8 references indexed in Scilit:
- Noise due to Brownian motion in ultrasensitive solid-state pressure sensorsIEEE Transactions on Electron Devices, 1987
- Basic limitations of isfet and silicon pressure transducers: noise theory, models and device scalingSensors and Actuators, 1983
- Temperature sensitivity in silicon piezoresistive pressure transducersIEEE Transactions on Electron Devices, 1983
- SENSIM: A simulation program for solid-state pressure sensorsIEEE Transactions on Electron Devices, 1982
- An electrochemical P-N junction etch-stop for the formation of silicon microstructuresIEEE Electron Device Letters, 1981
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Diaphragm formation and pressure sensitivity in batch-fabricated silicon pressure sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1978
- Approximate Analysis of the Large Deflection Elastic Behaviour of Clamped, Uniformly Loaded, Rectangular PlatesJournal of Mechanical Engineering Science, 1969