Silicon oxinitride and aluminum films interface: Rutherford backscattering and high resolution electron-energy-loss spectroscopic studies
- 1 May 1992
- journal article
- Published by Elsevier in Surface Science
- Vol. 269-270, 1054-1059
- https://doi.org/10.1016/0039-6028(92)91392-o
Abstract
No abstract availableKeywords
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