Simple mathematical model for negative photoresist behavior
- 1 January 1977
- journal article
- Published by Optica Publishing Group in Journal of the Optical Society of America
- Vol. 67 (1) , 92-96
- https://doi.org/10.1364/josa.67.000092
Abstract
A very simplified mathematical model is proposed to account for experimental behavior of a negative photoresist: MICRORESIST 747 of Kodak. Computed curves are presented for different parameters’ values.Keywords
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