Two dimensional profiling using secondary ion mass spectrometry

• 1 January 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (1) , 353-357
• https://doi.org/10.1116/1.586358

Abstract

Keywords

• SECONDARY ION MASS SPECTROMETRY