Microstructure of PZT sol-gel films on Pt substrates with different adhesion layers
- 31 December 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 29 (1) , 297-300
- https://doi.org/10.1016/0167-9317(95)00164-6
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Use of Transmission Electron Microscopy for the Characterization of Rapid Thermally Annealed, Solution‐Gel, Lead Zirconate Titanate FilmsJournal of the American Ceramic Society, 1994
- Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integrationJournal of Applied Physics, 1994