Plasma deposition of thin films from a fluorine-containing cyclosiloxane

• 15 January 1994
• journal article
• research article
• Published by Wiley in Journal of Polymer Science Part A: Polymer Chemistry
• Vol. 32  (1) , 121-130
• https://doi.org/10.1002/pola.1994.080320114

Abstract

Keywords

• PLASMA POLYMERIZATION
• THIN FILMS
• FLUOROSILOXANES
• ANTISCRATCH COATINGS