Planar-processed tungsten and polysilicon vacuum microelectronic devices with integral cavity sealing
- 1 March 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (2) , 493-496
- https://doi.org/10.1116/1.586848
Abstract
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