Influence of composition and process parameters on the internal stress of the carbides of tungsten, chromium, and titanium

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Abstract
We have investigated the relationship between deposition process and mechanical properties of metal+carbon coatings of three different metals. We used a conventional sputtering system, equipped with planar magnetrons, whose configuration can be scaled up easily to an industrial batch coater. Metal as well as carbide targets were compared and acetylene was used as a reactive gas. The films were deposited onto substrates made of a high-speed steel. Internal stresses were determined by measuring mechanically the flexture of a thin disk. The variation of the mechanical properties, internal stress, and hardness were completely different for the three metals.

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