Thermo-optic phase modulators in SIMOX material

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Abstract
An investigation of a series of low-power thermo-optic phase-modulating devices fabricated in SIMOX material suitable for use in distributed sensing or as optical variable attenuators is presented. These devices are integrated in a balanced Mach-Zehnder Interferometer utilizing multi-micron vertical sidewall rib waveguides and exhibit low polarization dependence. The investigation highlights the power consumption of various lengths of devices with low-lateral heat diffusion operated by ohmic heating and quantifies the attainable modulation depths under quasi-static operation. Non-linear device behavior is demonstrated and explained with a proposal for these characteristics giving rise to devices which would operate with further power reductions. AC characteristics are also investigated, showing the modulation to have 3 dB bandwidths of approximately 40kHz. A second device geometry is presented which was fabricated utilizing an under-etching technique to suspend the arms of the Mach-Zehnder. Results indicate lower power operation with a corresponding reduction in bandwidth to approximately 1kHz. An improvement in overall device geometry provides modulation depths in excess of 99 percent, independent of both bandwidth and power.

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