Interface structural characterization of strained-layer (001) SimGen superlattices by Raman spectroscopy
- 1 October 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- p. 195-206
- https://doi.org/10.1117/12.20790
Abstract
Vibrational modes of the buried interfacial regions in strained layer SimGen SL's have been studied by Raman spectroscopy. The distinct but weak excitations depend on the strain distribution and are suggested to be related to localized modes of Si0.5Ge0.5 alloy layers at the interfaces. An extended annealing study is presented showing how these excitations become more pronounced as the interfaces are broadened. Long range order has been found by ThM in contrast to Raman scattering.Keywords
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