Near-surface compositional modifications of ternary alloys during sputtering at elevated temperatures
- 1 May 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 42 (1) , 49-60
- https://doi.org/10.1016/0168-583x(89)90010-4
Abstract
No abstract availableThis publication has 33 references indexed in Scilit:
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