Conversion of Silicon Nitride Films to Anodic SiO[sub 2]

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (6) , 603
• https://doi.org/10.1149/1.2426662

Abstract

Keywords

• ANODIC SIO
• CONVERSION
• SILICON NITRIDE FILMS
• FILMS TO ANODIC