Reversible SMA actuator for micron sized robot
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A micron-sized robot using reversible shape-memory alloys (RSMA) is proposed. A larger active bending frame using larger-sized RSMA is analyzed and its homogeneous transformation matrix is derived. A SCARA robot using two larger-sized RSMAs was made and controlled by electrical current. It is shown that thin film of reversible TiNi alloy for a micron-sized robot could be made by a magnetron sputtering method and by heat treatment methods, and that the frequency response of 10- mu m-thick thin film of reversible TiNi alloy is about 5 Hz.Keywords
This publication has 2 references indexed in Scilit:
- A New Actuator of a Joint Mechanism Using TiNi Alloy WireThe International Journal of Robotics Research, 1986
- Pseudoelasticity and shape memory effects in alloysInternational Materials Reviews, 1986