Reversible SMA actuator for micron sized robot

Abstract
A micron-sized robot using reversible shape-memory alloys (RSMA) is proposed. A larger active bending frame using larger-sized RSMA is analyzed and its homogeneous transformation matrix is derived. A SCARA robot using two larger-sized RSMAs was made and controlled by electrical current. It is shown that thin film of reversible TiNi alloy for a micron-sized robot could be made by a magnetron sputtering method and by heat treatment methods, and that the frequency response of 10- mu m-thick thin film of reversible TiNi alloy is about 5 Hz.

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