Implantation temperature measurement using impurity luminescence

1 January 1979

journal article
research article
Published by Taylor & Francis in Radiation Effects

Vol. 43 (2) , 61-64
https://doi.org/10.1080/00337577908226444

Abstract

This letter reports variations on a technique for estimating the temperature of the irradiated region of an insulating material during ion implantation.

Keywords

TEMPERATURE MEASUREMENT
IMPLANTATION TEMPERATURE
USING IMPURITY
ESTIMATING THE TEMPERATURE
IMPURITY LUMINESCENCE
IRRADIATED
ION IMPLANTATION