Theoretical concept for the prediction of the extension of the lifetime of ion-implanted tools from short-time measurements
- 1 February 1985
- journal article
- Published by Elsevier in Materials Science and Engineering
- Vol. 69 (1) , 227-231
- https://doi.org/10.1016/0025-5416(85)90396-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Techniques and equipment for non-semiconductor applications of ion implantationNuclear Instruments and Methods in Physics Research, 1981
- Friction and wear of ion-implanted metals—A reviewThin Solid Films, 1979
- Ion implantation in tribology and corrosion scienceJournal of Vacuum Science and Technology, 1978