Plasma polymerization of hexafluoroethane

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Abstract
It was found that when hydrogen is mixed in a plasma, hexafluoroethane polymerization is accelerated. ESCA and IR spectroscopy were used to characterize the resulting polymers and to reveal the reaction mechanism. At relatively low hydrogen/hexafluoroethane ratios and radio‐frequency powers of 30 and 100 W (13.56 MHz), no hydrogen could be detected in the polymers with IR spectroscopy. However, after the ratio had increased above one, the hydrogen content increased abruptly. Thus, hydrogen might be looked upon as a sort of scavenger for active fluorine species. ESCA deconvolution analysis of the C1s peaks of the polymers indicated that the polymer structures were uniform throughout the reactor in the hydrogen/hexafluoroethane system at 30 W, even though the distribution of the deposition rate could still be observed. By examining sodium chloride powder exposed to the plasma with IR spectroscopy, it was possible to detect various fluorosilicates, which indicated ablation of the reactor's glass wall by the plasma.

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